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On the Application of Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring

Author(s):
J. Röpcke ( INP-Greifswald, Greifswald, Germany )
S. Glitsch ( INP-Greifswald, Greifswald, Germany )
F. Hempel ( INP-Greifswald, Greifswald, Germany )
S. Saβ ( INP-Greifswald, Greifswald, Germany )
K.-D. Schulz ( Schulz & Walter Elektronik GmbH, Kemnitz, Germany )
K.-D. Weltmann ( NP-Greifswald, Greifswald, Germany )
H. Zimmermann ( NP-Greifswald, Greifswald, Germany )
2 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
27
Page(to):
29
Pages:
3
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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