Materials Processing in Electron Beam-Generated Plasmas

Author(s):

• C. Muratore ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• S.G. Walton ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• D. Leonhardt ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• R.F. Fernsler ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• R.A. Meger ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )

Publication title:

47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

47

Pub. Year:

2004

Page(from):

412

Page(to):

417

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/47

Type:

Conference Proceedings