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Real-time Monitoring of Ion Energy and Ion Flux in Plasma Reactors Using RF Current and Voltage Measurements

Author(s):
M.A. Sobolewski ( National Institute of Standards and Technology, Gaithersburg, MD )  
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
405
Page(to):
411
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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