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Improving Rate Control in Electron-Beam Evaporated Optical Coatings: The Role of Arcing and Controller Tuning

Author(s):
  • M. Gevelber ( Manufacturing Engineering, Boston University, Brookline, MA )
  • B. Xu ( Manufacturing Engineering, Boston University, Brookline, MA )
  • D. Smith ( Vacuum Process Technology Inc., Plymouth, MA )
  • J. Oliver ( Laboratory for Laser Energetics, University of Rochester, Rochester, NY )
  • J. Howe ( Laboratory for Laser Energetics, University of Rochester, Rochester, NY )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
395
Page(to):
404
Pages:
10
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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