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Arc Management in DC and MF Generators for Large Area Coating Systems

Author(s):
  • T. Rettich ( Hüttinger Elecktronik GmbH + Co. KG, Freiburg, Germany )
  • R Wiedemuth ( Hüttinger Elecktronik GmbH + Co. KG, Freiburg, Germany )
  • L. Anderson ( Huettinger Electronic, Inc., Farmington, CT )
Publication title:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
47
Pub. Year:
2004
Page(from):
237
Page(to):
240
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/47
Type:
Conference Proceedings

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