Arc Management in DC and MF Generators for Large Area Coating Systems
- Author(s):
- T. Rettich ( Hüttinger Elecktronik GmbH + Co. KG, Freiburg, Germany )
- R Wiedemuth ( Hüttinger Elecktronik GmbH + Co. KG, Freiburg, Germany )
- L. Anderson ( Huettinger Electronic, Inc., Farmington, CT )
- Publication title:
- 47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 47
- Pub. Year:
- 2004
- Page(from):
- 237
- Page(to):
- 240
- Pages:
- 4
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/47
- Type:
- Conference Proceedings
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