A Novel Pulsed Supply With Arc Handling and Leading Edge Control as Enabling Technology for High Power Pulsed Magnetron Sputtering (HPPMS)

A Novel Pulsed Supply With Arc Handling and Leading Edge Control as Enabling Technology for High Power Pulsed Magnetron Sputtering (HPPMS)

Author(s):

D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
W.D. Sproul ( Advanced Energy Industries, Inc., Fort Collins, CO )
D.C. Carter ( Advanced Energy Industries, Inc., Fort Collins, CO )
F. Tomasel ( Advanced Energy Industries, Inc., Fort Collins, CO )

Publication title:

47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

47

Pub. Year:

2004

Page(from):

113

Page(to):

118

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/47

Type:

Conference Proceedings

Details

TDL ID:	ZA00049385
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2004 : 47th
Conf. info. (Venue):	Dallas, Texas USA
Conf. info. (Date):	2004.04.24-2004.04.29

Similar Items:

1 Conference Proceedings The Reactive Sputter Deposition of Aluminum Oxide Coatings Using High Power Pulsed Magnetron Sputtering (HPPMS) W.D. Sproul, D.J. Christie, D.C. Carter Society of Vacuum Coaters	7 Conference Proceedings A Multi-Zone, Multi-Gas Reactive Sputtering Control System W.D. Sproul, D.J. Christie, D.C. Carter Society of Vacuum Coaters
2 Conference Proceedings Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering B.M. DeKoven, P.R. Ward, R.E. Weiss, D.J. Christie, R.A. Scholl, W.D. Sproul, F. Tomasel, A. Anders Society of Vacuum Coaters	8 Conference Proceedings High Power Pulse Reactive Sputtering of TiO₂ J.A. Davis, W.D. Sproul, D.J. Christie, M. Geisler Society of Vacuum Coaters
3 Conference Proceedings Deposition of High Conductivity ITO Films by High Power Pulsed Magnetron Sputtering (HPPMS) V. Sittinger, F. Ruske, C. Gerloff, W. Werner, B. Szyszka, D.J. Christie Society of Vacuum Coaters	9 Conference Proceedings High Power Pulsed Reactive Sputtering of Zirconium Oxide and Tantalum Oxide D.A. Glocker, M.M. Romach, D.J. Christie, W.D. Sproul Society of Vacuum Coaters
4 Conference Proceedings Mid-Frequency Dual Magnetron Reactive Co-Sputtering for Deposition of Customized Index Optical Films D.J. Christie, W.D. Sproul, D. Carter Society of Vacuum Coaters	10 Conference Proceedings Advances in High Power Pulse Reactive Magnetron Sputtering R. Chistyakov, B. Abraham, W.D. Sproul Society of Vacuum Coaters
5 Conference Proceedings Control of the Reactive Sputtering Process Using Two Reactive Gases W.D. Sproul, D.J. Christie, D.C. Carter, S. Berg, T. Nyberg Society of Vacuum Coaters	11 Conference Proceedings Model Prediction and Empirical Confirmation of Rate Scaling with Peak Power for High Power Pulse Magnetron Sputtering (HPPMS) Deposition of Thin Ag Films D.J. Christie, A. Pflug, V. Sittinger, F. Ruske, M. Siemers, B. Szyszka, M. Geisler Society of Vacuum Coaters
6 Conference Proceedings Effective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases D.C. Carter, W.D. Sproul, D.J. Christie Society of Vacuum Coaters	12 Conference Proceedings Integrated Process Control for Reactive Sputter Deposition of Dielectric Thin Films D. Carter, W.D. Sproul, D. Christie Society of Vacuum Coaters

1

2

3

4

5

6

7

8

9

10

11

12