Flexible Reactive Gas Sputtering Process Control
- Author(s):
- V. Bellido-González ( Gencoa Ltd., Liverpool, United Kingdom )
- B. Daniel ( Gencoa Ltd., Liverpool, United Kingdom )
- J. Counsell ( Gencoa Ltd., Liverpool, United Kingdom )
- M. Stevens ( Gencoa Ltd., Liverpool, United Kingdom )
- E. Momeñe ( Cromo Duro, Bilbao, Spain )
- Publication title:
- 47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 47
- Pub. Year:
- 2004
- Page(from):
- 44
- Page(to):
- 48
- Pages:
- 5
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/47
- Type:
- Conference Proceedings
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