Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control
- Author(s):
J.N. Hilfiker ( J.A. Woollam Company, Lincoln, NE ) B. Johs ( J.A. Woollam Company, Lincoln, NE ) J. Hale ( J.A. Woollam Company, Lincoln, NE ) C.M. Herzinger ( J.A. Woollam Company, Lincoln, NE ) T.E. Tiwald ( J.A. Woollam Company, Lincoln, NE ) C.L. Bungay ( J.A. Woollam Company, Lincoln, NE ) R.A. Synowicki ( J.A. Woollam Company, Lincoln, NE ) G.K. Pribil ( J.A. Woollam Company, Lincoln, NE ) J.A. Woollam ( J.A. Woollam Company, Lincoln, NE ) - Publication title:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 46
- Pub. Year:
- 2003
- Page(from):
- 365
- Page(to):
- 370
- Pages:
- 6
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/46
- Type:
- Conference Proceedings
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