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Improvements in High-Power Generators and System Control for Large Area Coatings

Author(s):
  • T. Rettich ( Hüttinger Elecktronik GmbH Co. KG, Freiburg, Germany )
  • P. Wiedemuth ( Hüttinger Elecktronik GmbH Co. KG, Freiburg, Germany )
  • L. Anderson ( Huettinger Electronic Inc., Farmington, CT )
Publication title:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
46
Pub. date:
2003
Vol.:
46
Page(from):
269
Page(to):
271
Pages:
3
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/46
Type:
Conference Proceedings

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