Plasma Processing System Based on Electron Beam Ionization

Author(s):

D. Leonhardt ( Naval Research Laboratory, Plasma Physics Division, Washington, DC )

M.M. Balkey ( Naval Research Laboratory, Plasma Physics Division, Washington, DC )

R.F. Fernsler ( Naval Research Laboratory, Plasma Physics Division, Washington, DC )

R.A. Meger ( Naval Research Laboratory, Plasma Physics Division, Washington, DC )

D.P. Murphy ( Naval Research Laboratory, Plasma Physics Division, Washington, DC )

S.G. Walton ( SFA, Inc., Largo, MD )

D.D. Blackwell ( SFA, Inc., Largo, MD )

2 more

Publication title:

45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

45

Pub. Year:

2002

Page(from):

354

Page(to):

359

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/45

Type:

Conference Proceedings