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Process Development for Large Area Reactive Magnetron Sputtering

Author(s):
  • C. May ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
  • F. Milde ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
  • G. Teschner ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
153
Page(to):
158
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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