Process Control Requirements for Uniform Large Area Coatings
- Author(s):
- L. Anderson ( Hüttinger Elektronik GmbH + Co. KG, Freiburg, Germany )
- T. Rettich ( Hüttinger Elektronik GmbH + Co. KG, Freiburg, Germany )
- P. Wiedemuth ( Hüttinger Elektronik GmbH + Co. KG, Freiburg, Germany )
- Publication title:
- 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 45
- Pub. Year:
- 2002
- Page(from):
- 148
- Page(to):
- 152
- Pages:
- 5
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/45
- Type:
- Conference Proceedings
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