Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating
- Author(s):
- F. Milde ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
- D. Schulze ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
- G. Teschner ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
- P. Wiedemuth ( Hüttinger Elektronik GmbH, Freiburg, Germany )
- T. Rettich ( Hüttinger Elektronik GmbH, Freiburg, Germany )
- Publication title:
- 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 44
- Pub. Year:
- 2001
- Page(from):
- 375
- Page(to):
- 381
- Pages:
- 7
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/44
- Type:
- Conference Proceedings
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