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Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating

Author(s):
  • F. Milde ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
  • D. Schulze ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
  • G. Teschner ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
  • P. Wiedemuth ( Hüttinger Elektronik GmbH, Freiburg, Germany )
  • T. Rettich ( Hüttinger Elektronik GmbH, Freiburg, Germany )
Publication title:
44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
44
Pub. date:
2001
Vol.:
44
Page(from):
375
Page(to):
381
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/44
Type:
Conference Proceedings

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