Practical Aspects of High Power MF and DC Generators in Large Area Coating Systems
- Author(s):
- T. Rettich ( Hüttinger Elektronik GmbH & Co. KG, Freiburg, Germany )
- P. Wiedemuth ( Hüttinger Elektronik GmbH & Co. KG, Freiburg, Germany )
- Publication title:
- 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
- Title of ser.:
- Annual Technical Conference of Society of Vacuum Coaters
- Ser. no.:
- 44
- Pub. Year:
- 2001
- Page(from):
- 214
- Page(to):
- 217
- Pages:
- 4
- Pub. info.:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- Language:
- English
- Call no.:
- A63930/44
- Type:
- Conference Proceedings
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