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Practical Aspects of High Power MF and DC Generators in Large Area Coating Systems

Author(s):
  • T. Rettich ( Hüttinger Elektronik GmbH & Co. KG, Freiburg, Germany )
  • P. Wiedemuth ( Hüttinger Elektronik GmbH & Co. KG, Freiburg, Germany )
Publication title:
44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
44
Pub. date:
2001
Vol.:
44
Page(from):
214
Page(to):
217
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/44
Type:
Conference Proceedings

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