Gas Inlet Systems for Large Area Linear Magnetron Sputtering Sources

Gas Inlet Systems for Large Area Linear Magnetron Sputtering Sources

Author(s):

F. Milde ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
G. Teschner ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
C. May ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )

Publication title:

44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

44

Pub. Year:

2001

Page(from):

204

Page(to):

209

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/44

Type:

Conference Proceedings

Details

TDL ID:	ZA00049382
Series ID:	PA00000013
Conf. info. (Name):	Annual Technical Conference Proceedings
Conf. info. (Number):	2001
Conf. info. (Venue):	Philadelphia, Pennsylvania USA
Conf. info. (Date):	2001.04.21-2001.04.26

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