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MF, DC and Pulsed DC in Practical Use for Large Area Coating

Author(s):
  • T. Rettich ( Hüttinger Elektronik GmbH & Co. KG, Germany )
  • P. Wiedemuth ( Hüttinger Elektronik GmbH & Co. KG, Germany )
Publication title:
43rd Annual Technical Conference proceedings, April 15-20, 2000, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
43
Pub. Year:
2000
Page(from):
147
Page(to):
152
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/43
Type:
Conference Proceedings

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