Using Thermal Oxidation and Rapid Thermal Annealing on Polycrystalline-SiGe for Ge Nanocrystals
- Author(s):
Chyuan-Haur Kao C. S. Lai M. C. Tsai C. H. Lee C. S. Huang C. R. Chen - Publication title:
- Materials science and technology for nonvolatile memories : symposium held March 24-27, 2008, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1071
- Pub. Year:
- 2008
- Page(from):
- 55
- Page(to):
- 62
- Pages:
- 8
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605110417 [1605110418]
- Language:
- English
- Call no.:
- M23500/1071
- Type:
- Conference Proceedings
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