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Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing

Author(s):
Paul Timans
Yao Zhi Hu
Jeff Gelpey
Steve McCoy
Wilfried Lerch
Silke Paul
Detlef Bolze
Hamid Kheyrandish
3 more
Publication title:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1070
Pub. Year:
2008
Page(from):
155
Page(to):
162
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110400 [160511040X]
Language:
English
Call no.:
M23500/1070
Type:
Conference Proceedings

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