Blank Cover Image

Ion Implantation for LOW-Resistive Source/Drain Contacts in Finfet Devices

Author(s):
Mark J. H. van Dal
Ray Duffy
Bartek J. Pawlak
Nadine Collaert
Malgorzata Jurczak
Robert J. P. Lander
1 more
Publication title:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1070
Pub. date:
2008
Vol.:
1070
Page(from):
67
Page(to):
78
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110400 [160511040X]
Language:
English
Call no.:
M23500/1070
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Doping of Sub-50nm SOI Layers

Bartek J. Pawlak, Ray Duffy, Mark van Dal, Frans Voogt, Robbert Weemaes, Fred Roozeboom, Peer Zalm, Nick Bennett, Nick …

Materials Research Society

Akheyar, A., Lauwers, A., Kitti, J.A., De Potter, M, Chamirian, O., Jonckheere, R., Leunissen, P., van Dal, M, Lindsay, …

Electrochemical Society

M.J. Van Dal, G. Vellianitis, R. Duffy, G. Doornbos, B. Pawlak

Electrochemical Society

Pawlak, B.J., Duffy, R., Janssens, T., Vandenorst, W., Seven, S., Richard, O., Benedetti, A., Eyben, P., Colombeau, B., …

Electrochemical Society

Pierre Eyben, Simone Severi, Ray Duffy, Bartek J. Pawlak, Emmanuel Augendre, Wilfried Vandervorst

Materials Research Society

Benjamin Dumont, Arnaud Pouydebasque, Bartek J. Pawlak, Benjamin Oudet, Dominique Delille, Frederic Milesi, Kader …

Materials Research Society

4 Conference Proceedings Doping Strategies for FinFETs

B.J. Pawlak, R. Duffy, A.D. Keersgieter

Trans Tech Publications

Bartek J. Pawlak, Ray Duffy, Emmanuel Augendre, Simone Severi, Tom Janssens, Philippe Absil, Wilfried Vandervorst, Erik …

Materials Research Society

Andrzej Jakubowski, Malgorzata Jurczak, Lukasiak Lidia

Narosa Publishing House

Lauwers, Anne, Lindsay, Richard, Henson, Kirklen, Severi, Simone, Akheyar, Amal, Pawlak, Bartek J., Potter, Muriel de, …

Materials Research Society

Jay Mody, Pierre Eyben, Wouter Polspoel, Malgorzata Jurczak, Wilfried Vandervorst

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12