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Long-Term Characterization of 6H-SiC Transistor Integrated Circuit Technology Operating at 500 ℃

Author(s):
Philip G. Neudeck
David J. Spry
Liang-Yu Chen
Carl W. Chang
Glenn M. Beheim
Robert S. Okojie
Laura J. Evans
Roger D. Meredith
Terry L. Ferrier
Michael J. Krasowski
Norman F. Prokop
6 more
Publication title:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1069
Pub. Year:
2008
Page(from):
209
Page(to):
214
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
Language:
English
Call no.:
M23500/1069
Type:
Conference Proceedings

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