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High-Frequency Electron Paramagnetic Resonance Study of the As-Deposited and Annealed Carbon-Rich Hydrogenated Amorphous Silicon-Carbon Films

Author(s):
A. V. Vasin
E. N. Kalabukhova
S. N. Lukin
D. V. Savchenko
V. S. Lysenko
A. N. Nazarov
A. V. Rusavsky
Y. Koshka
3 more
Publication title:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1069
Pub. date:
2008
Vol.:
1069
Page(from):
175
Page(to):
180
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
Language:
English
Call no.:
M23500/1069
Type:
Conference Proceedings

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