Blank Cover Image

Stress Mapping of SiC Wafers by Synchrotron White Beam X-ray Reticulography

Author(s):
Publication title:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1069
Pub. Year:
2008
Page(from):
95
Page(to):
100
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
Language:
English
Call no.:
M23500/1069
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Studies of c-Axis Threading Screw Dislocations in Hexagonal SiC

Yi Chen, Ning Zhang, Xianrong Huang, Govindhan Dhanaraj, Edward Sanchez, Michael F. MacMillan, Michael Dudley

Materials Research Society
7 Conference Proceedings Polytype Identification and Mapping in Heteroepitaxial Growth of 3C on Atomically Flat 4H-SiC Mesas Using Synchrotron White-Beam X-Ray Topography

Dudley, M., Vetter, W.M., Huang, X.R., Neudeck, P.G., Powell, J.A.

Trans Tech Publications
2 Conference Proceedings Determination of the Core-structure of Shockley Partial Dislocations in 4H-SiC

Yi Chen, Ning Zhang, Xianrong Huang, Joshua D Caldwell, Kendrick X Liu, Robert E Stahlbush, Michael Dudley

Materials Research Society
8 Conference Proceedings SYNCHROTRON X-RAY TOPOGRAPHIC STUDY OF THE BEHAVIOR OF DEFECTS IN HIGH CARBON-CONTENT Si WAFERS DURING RTP

Fanning, Thomas, Dudley, Michael, Wang, Franklin F. Y., Gordon-Smith, David

Materials Research Society
3 Conference Proceedings Characterization of SiC Using Synchrotron White Beam X-Ray Topography

Dudley, M., Huang, X.

Trans Tech Publications
9 Conference Proceedings Origins of Twinned Microstructures in B₁₂As₂ Epilayers Grown on (0001) 6H-SiC and Their Influence on Physical Properties

Yu Zhang, Hui Chen, Ning Zhang, Michael Dudley, Yinyan Gong, Martin Kuball, Zhou Xu, Yi Zhang, James Edgar, Lihua Zhang, …

Materials Research Society
4 Conference Proceedings Mapping of Defects in Large-Area Silicon Carbide Wafers via Photoluminescence and its Correlation with Synchrotron White Beam X-Ray Topography

Y. Chen, R. Balaji, M. Dudley, M. Murthy, S.I. Maximenko

Trans Tech Publications
10 Conference Proceedings RAPID STRUCTURAL DEFECT MAPPING OF BULK II-VI SEMICONDUCTORS USING WHITE-BEAM SYNCHROTRON TOPOGRAPHY AND X-RAY ROCKING CURVE ANALYSIS.

Marzio, Don Di, Casagrande, Louis G., Lee, Myung B., Fanning, Thomas, Dudley, Michael

Materials Research Society
5 Conference Proceedings Synchrotron White Beam Topography Studies of Residual Stress in SiC Single Crystal Wafers With Epitaxial Thin Films

Huang, W., Wang, Q., Dudley, M., Chiang, F. P., Parsons, J., Fazi, C.

MRS - Materials Research Society
11 Conference Proceedings Synchrotron White Beam X-ray Topography (SWBXT) and High Resolution Triple Axis Diffraction Studies on AlN Layers Grown on 4H- and 6H-SiC Seeds

Raghothamachar, Balaji, Dudley, Michael, Dalmau, Rafael, Schlesser, Raoul, Sitar, Zlatko

Materials Research Society
6 Conference Proceedings Polytype Identification and Mapping in Heteroepitaxial Growth of 3C on Atomically Flat 4H-SiC Mesas Using Synchrotron White-Beam X-Ray Topography

Dudley, M., Vetter, W.M., Huang, X.R., Neudeck, P.G., Powell, J.A.

Trans Tech Publications
12 Conference Proceedings Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices

Dudley, M., Huang, X., Vetter, W.M., Neudeck, P.G.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12