Blank Cover Image

Effect of Annealing Temperature on SiC Wafer Bow and Warp

Author(s):
Publication title:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1069
Pub. Year:
2008
Page(from):
101
Page(to):
108
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
Language:
English
Call no.:
M23500/1069
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Improvement of SiC Wafer Warp by Annealing

Sasaki, M., Harada, S., Okamoto, Y., Kinoshita, H., Miyanagi, Y., Shiomi, H.

Trans Tech Publications
7 Conference Proceedings Background Impurity Reduction and Iron Doping of Gallium Nitride wafers

Vaudo, Robert P., Xu, Xueping, Salant, Allan D., Malcarne, Joseph A., Hutchins, Edward L., Brandes, George R.

Materials Research Society
2 Conference Proceedings Growth of Large Diameter 6H SI and 4H n+ SiC Single Crystals

Avinash Gupta, Ping Wu, Varatharajan Rengarajan, Xueping Xu, Murugesu Yoganathan, Chris Martin, Ejiro Emorhokpor, Andy …

Materials Research Society
8 Conference Proceedings Effect of Implantation Temperature on Redistribution of Al in SiC during Annealing

Usov, I.O., Suvorova, A.A., Suvorov, A.V.

Trans Tech Publications
3 Conference Proceedings The Effect of Epitaxial Growth on Warp of SiC Wafers

Nakayama, K., Miyanagi, Y., Maruyama, K., Okamoto, Y., Shiomi, H., Nishino, S.

Trans Tech Publications
9 Conference Proceedings Carbon Nanotube-Based Vacuum Microelectronic Gated Cathode

Xu, Xueping, Brandes, George R.

MRS - Materials Research Society
4 Conference Proceedings The Effect of Epitaxial Growth on Warp of SiC Wafers

Nakayama, K., Miyanagi, Y., Maruyama, K., Okamoto, Y., Shiomi, H., Nishino, S.

Trans Tech Publications
10 Conference Proceedings The Study of High Temperature Annealing of a-SiC:H Films

Zhang, S., Hu, Z., Raniero, L., Liao, X., Ferreira, I., Fortunato, E., Vilarinho, P.M., Pereira, L., Martins, R.

Trans Tech Publications
5 Conference Proceedings Propagation and Density Reduction of Threading Dislocations in SiC Crystals during Sublimation Growth

Ping Wu, Xueping Xu, Varatharajan Rengarajan, Ilya Zwieback

Materials Research Society
11 Conference Proceedings EFFECT OF HIGH TEMPERATURE ANNEALING ON THE MICROSTRUCTURE OF SCS-6 SIC FIBERS

Ning, X.J., Pirouz, P., Bhatt, R.T.

Materials Research Society
6 Conference Proceedings Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

R. Anzalone, M. Camarda, A. Auditore, N. Piluso, A. Severino

Trans Tech Publications
12 Conference Proceedings Design and analysis of bow-tie aperture with strong near-field enhancement effect

Xu, J., Wang, J., Tian, Q.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12