Mechanical Properties of 3C-SiC Films for MEMS Applications

Mechanical Properties of 3C-SiC Films for MEMS Applications

Author(s):

Publication title:

Fundamentals of nanoindentation and nanotribology IV : symposium held November 26-29, 2007, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1049

Pub. Year:

2007

Page(from):

41

Page(to):

48

Pages:

8

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558999893 [1558999892]

Language:

English

Call no.:

M23500/1049

Type:

Conference Proceedings

Details

TDL ID:	ZA00049368
Series ID:	PA00000011
Conf. info. (Name):	Symposium on fundamentals of nanoindentation and nanotribology
Conf. info. (Number):	4th
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2007.11.26-2007.11.29

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