Dynamic Maskless Holographic Lithography

Dynamic Maskless Holographic Lithography

Author(s):

Publication title:

19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B; Volume 3

Title of ser.:

ASME Symposia Volumes

Ser. no.:

DETC 2007(3B)

Pub. Year:

2007

Vol.:

3B

Paper no.:

DETC2007-35164

Page(from):

977

Page(to):

984

Pages:

8

Pub. info.:

New York, N.Y.: American Society of Mechanical Engineers

ISBN:

9780791848043 [0791848043]

Language:

English

Call no.:

A11633/2007

Type:

Conference Proceedings

Details

TDL ID:	ZA00048617
Series ID:	PA00000270
Conf. info. (Name):	ASME Design Engineering Technical Conference ; International Conference on Micro and Nano Systems ; International Conference on Advanced Vehicle and Tire Technologies
Conf. info. (Number):	2007 ; 1st ; 9th
Conf. info. (Venue):	Las Vegas, Nevada USA
Conf. info. (Date):	2007.09.04-2007.09.07

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