Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

Author(s):

Publication title:

29th Mechanisms and Robotics Conference, Parts A and B; Volume 7

Title of ser.:

ASME Symposia Volumes

Ser. no.:

DETC 2005(7A)

Pub. Year:

2005

Vol.:

7A

Paper no.:

DETC2005-84217

Page(from):

511

Page(to):

518

Pages:

8

Pub. info.:

New York, N.Y.: American Society of Mechanical Engineers

ISBN:

9780791847442 [0791847446]

Language:

English

Call no.:

A11633/2005

Type:

Conference Proceedings

Details

TDL ID:	ZA00048603
Series ID:	PA00000270
Conf. info. (Name):	ASME International Design Engineering Technical Conference ; Computers and Information in Engineering Conference ; Mechanisms and Robotics Conference
Conf. info. (Number):	2005 ; 2005 ; 29th
Conf. info. (Venue):	Long Beach, California USA
Conf. info. (Date):	2005.09.24-2005.09.28

Similar Items:

1 Conference Proceedings Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainties Jessica R. Bronson, Gloria J. Wiens American Society of Mechanical Engineers	7 Conference Proceedings Fault modeling of electrostatic comb-drives for MEMS Charlot,B., Moussouris,S., Mir,S., Courtois,B. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Development of a Compliant Rotary-to-Translational Transmission Mechanism for a Micro-Parallel Kinematic Mechanism Jessica R. Bronson, Gloria J. Wiens, Irene Fassi American Society of Mechanical Engineers	8 Conference Proceedings Characterization of Dynamics in Special 6-6 PKMs Scott A. Shamblin, Gloria J. Wiens American Society of Mechanical Engineers
3 Conference Proceedings MEMS Optical Force Sensor Enhancement Via Compliant Mechanism Gustavo A. Roman, Gloria J. Wiens American Society of Mechanical Engineers	9 Conference Proceedings Structural Dynamics and System Identification of Parallel Kinematic Machines Gloria J. Wiens, David S. Hardage American Society of Mechanical Engineers
4 Conference Proceedings Miniature thermoacoustic cryocooler driven by a vertical comb-drive Hao, Z., Fowler, M., Hammer, J.A., Whitley, M.R., Brown, D. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Design of a new MEMS-based tunable grating with electrostatic comb drive Y. Yu, W. Yuan, J. Xu Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Parameter Sensitivity in System Identification of Parallel Mechanisms Gloria J. Wiens American Society of Mechanical Engineers	11 Conference Proceedings 299g. Improved Membrane Protein Expression Using Cell-Free Protein Synthesis Jessica J. Wuu, James R. Swartz American Institute of Chemical Engineers
6 Conference Proceedings Electrostatic comb drive for vertical actuation Lee,A.P., McConaghy,C.F., Krulevitch,P.A., Campbell,E.W., Sommargren,G.E., Trevino,J.C. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Critical dimension metrology for MEMS processes using electrical techniques Allen,R.A., Marshall,J.C. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12