
Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)
- Author(s):
- Publication title:
- 28th Design Automation Conference
- Title of ser.:
- ASME Symposia Volumes
- Ser. no.:
- DETC 2002(2)
- Pub. Year:
- 2002
- Vol.:
- 2
- Paper no.:
- DETC2002/DAC-34065
- Page(from):
- 267
- Page(to):
- 274
- Pages:
- 8
- Pub. info.:
- New York, N.Y.: American Society of Mechanical Engineers
- ISBN:
- 9780791836224 [0791836223]
- Language:
- English
- Call no.:
- A11633/2002
- Type:
- Conference Proceedings
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