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Strained Silicon-On-Insulator - Fabrication and Characterization

Author(s):
M. Reiche
C. Himcinschi
U. Gösele
S. Christiansen
S. Mantl
D. Buca
Q. Zhao
S. Feste
R. Loo
D. Nguyen
W. Buchholtz
A. Wei
M. Horstmann
D. Feijoo
P. Storck
10 more
Publication title:
Silicon-on-insulator technology and devices 13
Title of ser.:
ECS transactions
Ser. no.:
6(4)
Pub. date:
2007
Page(from):
339
Page(to):
344
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775533 [1566775531]
Language:
English
Call no.:
E23400/6-4
Type:
Conference Proceedings

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