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Fabrication of SOI MOSFET by "Separation by Bonding Silicon Islands (SBSI)" Method

Author(s):
K. Kanemoto
H. Oka
H. Hisamatsu
Y. Matsuzawa
Y. Kitano
T. Hara
M. Hoshina
S. Ohmi
J. Kato
4 more
Publication title:
Silicon-on-insulator technology and devices 13
Title of ser.:
ECS transactions
Ser. no.:
6(4)
Pub. Year:
2007
Page(from):
309
Page(to):
314
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775533 [1566775531]
Language:
English
Call no.:
E23400/6-4
Type:
Conference Proceedings

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