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Comparison of Different Etching Techniques in Order to Reveal Dislocations in Thick Ge Layers

Author(s):
A. Abbadie
J. Hartmann
C. Deguel
L. Sanchez
F. Brunier
F. Letertre
1 more
Publication title:
Silicon-on-insulator technology and devices 13
Title of ser.:
ECS transactions
Ser. no.:
6(4)
Pub. Year:
2007
Page(from):
263
Page(to):
270
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775533 [1566775531]
Language:
English
Call no.:
E23400/6-4
Type:
Conference Proceedings

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