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High dose Implantation Impact on the Carrier Mobility in Ultra-Thin Unstrained and Strained SOI Films

Author(s):
C. Dupre
P. Fazzini
T. Ernst
F. Cristiano
J. Hartmann
A. Claverie
F. Andrieu
O. Faynot
P. Rivallin
F. Laugier
G. Ghibaudo
S. Cristoloveanu
S. Deleonibus
8 more
Publication title:
Silicon-on-insulator technology and devices 13
Title of ser.:
ECS transactions
Ser. no.:
6(4)
Pub. date:
2007
Page(from):
33
Page(to):
38
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775533 [1566775531]
Language:
English
Call no.:
E23400/6-4
Type:
Conference Proceedings

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