High Density Inductively Coupled Plasma Etching of Zinc-Oxide(ZnO) and Indium-Zinc Oxide(IZO) | 東京工業大学附属図書館文献データベース

Blank Cover Image

High Density Inductively Coupled Plasma Etching of Zinc-Oxide(ZnO) and Indium-Zinc Oxide(IZO)

Author(s):

Publication title:

State-of-the-art program on compound semiconductors 46 (SOTAPOCS 46) and processes at the semiconductor/solution interface 2

Title of ser.:

ECS transactions

Ser. no.:

6(2)

Pub. Year:

2007

Page(from):

239

Page(to):

248

Pages:

10

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775519 [1566775515]

Language:

English

Call no.:

E23400/6-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00047126
Series ID:	PA00000034
Conf. info. (Name):	State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; International Symposium on Processes at the Semiconductor-Solution Interface ; Meeting of the Electrochemical Society
Conf. info. (Number):	46th ; 2nd ; 211th
Conf. info. (Venue):	Chicago, IL, USA
Conf. info. (Date):	2007.05.06-2007.05.10

Similar Items:

1 Conference Proceedings Metal-oxide Semiconductor Field-effect Transistors using Single ZnO Nanowire Heo, Young-Woo, Kang, B. S., Tien, L. C., Kwon, Y., La-Roche, J. R., Gila, B. P., Ren, F., Pearton, S. J., Norton, D. P. Materials Research Society	7 Conference Proceedings Wet Chemical Etching of Wide Bandgap Semiconductors- GaN, ZnO and SiC S. Pearton, W. Lim, F. Ren, D. Norton Electrochemical Society
2 Conference Proceedings Effect of Cryogenic Temperature Deposition of Various Metal Contacts to Bulk, Single-Crystal n-type ZnO Jon Wright, L. Stafford, B. P. Gila, D. P. Norton, S. J. Pearton, Hung-Ta Wang, F. Ren Materials Research Society	8 Conference Proceedings Comparison of ZnO Dry Etching in High Density Inductively Coupled CH₄/H₂ and C₂H₆/H₂-Based Chemistries W. Lim, S. Pearton, L.F. Voss, R. Khanna, J. Wright Electrochemical Society
3 Conference Proceedings Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F. Materials Research Society	9 Conference Proceedings Thermally Stable Novel Metal Contacts on Bulk, Single-Crystal n-type ZnO J. Wright, R. Khanna, L. F. Voss, L. Stafford, B. Gila, D. Norton, S. Pearton, F. Pen, I. I. Kravchenko Electrochemical Society
4 Conference Proceedings Sensitivity of Pt/ZnO Schottky Diode Characteristics to Hydrogen Kim, S., Kang, B. S., Ren, F., Ip, K., Heo, Y. W., Norton, D. P., Pearton, S. J. Electrochemical Society	10 Conference Proceedings Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., … MRS - Materials Research Society
5 Conference Proceedings Thin Nitride Barrier Self-Aligned Contact (TNBSAC) Oxide Etching in a High Density Inductively Coupled Plasma Using C4F8/CH3F/Ar Chemistry Kim, J-H., Ryu, J-O., Kim, J-S., Lee, B-C., Kim, J-W., Seol, Y-S. Electrochemical Society	11 Conference Proceedings High-Rate ECR Plasma Etching of Cu at Room Temperature in Cl2/Ar Jung, K-B., Lee, J. W., Park, Y. D., Childress, J. R., Pearton, S. J., Ren, F. MRS - Materials Research Society
6 Conference Proceedings Development of Thin Film and Nanorod ZnO-Based LEDs and Sensors S. J. Pearton, L. C. Tien, H. S. Kim, D. P. Norton, J. J. Chen, H. T. Wang, B. S. Kang, F. Ren, W. T. Lim, J. Wright, R. … Materials Research Society	12 Conference Proceedings ZnO Spintronics and Nanowire Devices Norton, David P., Heo, Young-Woo, Tien, L. C., Ivill, M. P., Li, Y., Kang, B. S., Ren, Fan, Kelly, J., Hebard, A. F., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12