Blank Cover Image

High Density Inductively Coupled Plasma Etching of Zinc-Oxide(ZnO) and Indium-Zinc Oxide(IZO)

Author(s):
W. Lim
L. Stafford
B. Gila
D. Norton
S. Pearton
F. Ren
J. Song
J. Park
Y. Heo
J. Lee
J. Kim
6 more
Publication title:
State-of-the-art program on compound semiconductors 46 (SOTAPOCS 46) and processes at the semiconductor/solution interface 2
Title of ser.:
ECS transactions
Ser. no.:
6(2)
Pub. date:
2007
Page(from):
239
Page(to):
248
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775519 [1566775515]
Language:
English
Call no.:
E23400/6-2
Type:
Conference Proceedings

Similar Items:

Heo, Young-Woo, Kang, B. S., Tien, L. C., Kwon, Y., La-Roche, J. R., Gila, B. P., Ren, F., Pearton, S. J., Norton, D. P.

Materials Research Society

S. Pearton, W. Lim, F. Ren, D. Norton

Electrochemical Society

Jon Wright, L. Stafford, B. P. Gila, D. P. Norton, S. J. Pearton, Hung-Ta Wang, F. Ren

Materials Research Society

W. Lim, S. Pearton, L.F. Voss, R. Khanna, J. Wright

Electrochemical Society

Shul, Randy J., Zhang, L., Baca, A.G., Willison, Christi G., Hans, J., Pearton, S.J., Lee, K.P., Ren, F.

Materials Research Society

J. Wright, R. Khanna, L. F. Voss, L. Stafford, B. Gila, D. Norton, S. Pearton, F. Pen, I. I. Kravchenko

Electrochemical Society

Kim, S., Kang, B. S., Ren, F., Ip, K., Heo, Y. W., Norton, D. P., Pearton, S. J.

Electrochemical Society

Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., …

MRS - Materials Research Society

Kim, J-H., Ryu, J-O., Kim, J-S., Lee, B-C., Kim, J-W., Seol, Y-S.

Electrochemical Society

Jung, K-B., Lee, J. W., Park, Y. D., Childress, J. R., Pearton, S. J., Ren, F.

MRS - Materials Research Society

S. J. Pearton, L. C. Tien, H. S. Kim, D. P. Norton, J. J. Chen, H. T. Wang, B. S. Kang, F. Ren, W. T. Lim, J. Wright, R. …

Materials Research Society

12 Conference Proceedings ZnO Spintronics and Nanowire Devices

Norton, David P., Heo, Young-Woo, Tien, L. C., Ivill, M. P., Li, Y., Kang, B. S., Ren, Fan, Kelly, J., Hebard, A. F., …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12