Reduced Parameter Fluctuation with Laser and Flash Lamp Anneal for 65nm Volume Production
- Author(s):
T. Feudel B. Bayha G. Burbach M. Gerhardt L. Herrmann M. Herden T. Mantei E. Ehrichs M. Greenlaw M. Horstmann - Publication title:
- Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment
- Title of ser.:
- ECS transactions
- Ser. no.:
- 6(1)
- Pub. Year:
- 2007
- Page(from):
- 373
- Page(to):
- 380
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775502 [1566775507]
- Language:
- English
- Call no.:
- E23400/6-1
- Type:
- Conference Proceedings
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