Blank Cover Image

Fabrication of InP/SiO2/Si Substrate using Ion-Cuffing Process and Selective Chemical Etching

Author(s):
P. Chen
D. Xu
L. Mawst
K. Henttinen
T. Suni
I. Suni
T. Kuech
S. Lau
3 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment
Title of ser.:
ECS transactions
Ser. no.:
6(1)
Pub. Year:
2007
Page(from):
99
Page(to):
104
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775502 [1566775507]
Language:
English
Call no.:
E23400/6-1
Type:
Conference Proceedings

Similar Items:

Suni, T., Henttinen, K., Suni, I., Maekinen, J.

Electrochemical Society

Luoto, H., Suni, T., Henttinen, K., Kulawski, M.

Electrochemical Society

Suni, T., Kiihamaeki, J., Henttinen, K., Suni, I, Maekinen, J.

Electrochemical Society

Sawada, T., Chen, W.X., Marshall, E.D., Kavanagh, K.L., Kuech, T.F., Pai, C.S., Lau, S.S.

Materials Research Society

D. Hwang, K. Kim, Y. Lee, S. Chae

Electrochemical Society

Shew, B.-Y., Huang, R.-S., Wang, D.-J., Perng, S.-Y., Kuan, C.-K., Cai, Y.Q., Chow, P.C., Schwoerer-Boehning, M., …

SPIE-The International Society for Optical Engineering

Dapeng Xu, Juno Yu-Ting Huang, Joo Hyung Park, Luke J. Mawst, Thomas F. Kuech, Xueyan Song, Susan E. Babcock

Materials Research Society

Teng, T.C., Shiau, Y., Chen, Y.S., Skinner, C., Peng, J.D., Palkuti, L.J.

North Holland

Xu, Z., Gamo, K., Namba, S.

Materials Research Society

Henttinen, K., Suni, T., Nurmela, A., Kulawski, M., Suni, I.

Electrochemical Society

Yu, L. S., Guan, Z. F., Deng, F., Liu, Q. Z., Pappert, S. A., Yu, P. K. L., Lau, S. S., Redwing, J., Geisz, J., Kuech, …

MRS - Materials Research Society

12 Conference Proceedings Integrated LED-photodiode chemical sensor

Yeh,J.-Y., Rusli,S., Pornsuwan,S., Ivanisevic,A., Nickel,A.-W., Ellis,A.B., Kuech,T.F., Mawst,L.J.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12