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Structural and Chemical Investigation of Annealed Al₂O₃ Films for Interpoly Dielectric Application in Flash Memories

Author(s):
A. Piagge
M. Caniatti
A. Del Vitto
C. Wiemer
G. Pavia
S. Alberici
E. Bellandi
A. Nale
M. Alessandri
4 more
Publication title:
Physics and technology of high-k gate dielectrics 4
Title of ser.:
ECS transactions
Ser. no.:
3(3)
Pub. Year:
2006
Page(from):
183
Page(to):
192
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775038 [1566775035]
Language:
English
Call no.:
E23400/3-3
Type:
Conference Proceedings

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