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The Present Status and Recent Advancements in Corona-Kelvin Non-Contact Electrical Metrology of Dielectrics for IC-Manufacturing

Author(s):
M. Wilson
D. Marinskiy
A. Byelyayev
J. D'Amico
A. Findlay
L. Jastrzebski
J. Lagowski
2 more
Publication title:
Physics and technology of high-k gate dielectrics 4
Title of ser.:
ECS transactions
Ser. no.:
3(3)
Pub. date:
2006
Page(from):
3
Page(to):
24
Pages:
22
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775038 [1566775035]
Language:
English
Call no.:
E23400/3-3
Type:
Conference Proceedings

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