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Study of Inhibition Characteristics of Slurry Additives in Copper CMP Using Force Spectroscopy

Author(s):
M. K. Keswani
H. Lee
S. Babu
U. Patri
Y. Hong
L. Economikos
M. Goldstein
L. Borucki
A. Philipossian
Y. Zhuang
5 more
Publication title:
Silicon materials science and technology X
Title of ser.:
ECS transactions
Ser. no.:
2(2)
Pub. Year:
2006
Page(from):
515
Page(to):
522
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
Language:
English
Call no.:
E23400/2-2
Type:
Conference Proceedings

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