Blank Cover Image

Infrared Absorption Measurement of Carbon Concentration in Silicon Crystals

Author(s):
Publication title:
Silicon materials science and technology X
Title of ser.:
ECS transactions
Ser. no.:
2(2)
Pub. Year:
2006
Page(from):
461
Page(to):
470
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
Language:
English
Call no.:
E23400/2-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Measurement of Nitrogen Concentration in CZ-Si below 1014/cm3 by IR Absorption Spectroscopy

Nakatsu, M., Hashimoto, A., Natsume, A., Inoue, N., Ono, H.

Electrochemical Society
7 Conference Proceedings Low-Temperature Infrared Absorption Measurement for Oxygen Concentration and Precipitates in Heavily-Doped Silicon Wafers

Koizuka, M., Inaba, M., Yamada-Kaneta, H.

MRS - Materials Research Society
2 Conference Proceedings Infrared Absorption Spectroscopy of Complexes in Low Carbon Concentration, Low Dose Irradiated CZ Silicon Crystal

N. Inoue, S. Yamazaki, Y. Goto, T. Kushida, T. Sugiyama

Electrochemical Society
8 Conference Proceedings IR tomography of the lifetime and diffusion length of charge carriers in semiconductor silicon ingots

Akhmetov, V. D., Fateev, N. V.

MRS-Materials Research Society
3 Conference Proceedings Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals

N. Inoue, A. Karen, H. Yagi, K. Masumoto, M. Shinomiya, K. Kashima, K. Eifuku, M. Koizumi, T. Takahashi, T. Takenawa, K. …

Electrochemical Society
9 Conference Proceedings Nitrogen in Thin Silicon Wafers Determined by Infrared Spectroscopy

Akhmetov, V.D., Lysytskiy, O., Richter, H.

Electrochemical Society
4 Conference Proceedings Infrared Measurement of Nitrogen Concentration in Cz Si

Hashimoto, A., Matsumoto, T., Funao, D., Inoue, N.

Electrochemical Society
10 Conference Proceedings Point Defect Generation by the Stress Due to Impurity Doping in Silicon Crystal

Kikuchi, M., Tanahashi, K., Inoue, N.

Electrochemical Society
5 Conference Proceedings Nitrogen Concentration Measurement of CZ Silicon

Inoue, N., Fujiyama, N., Yagi, H.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Estimation of Radiation-Induced Complex Concentration in CZ-Si by IR Absorption Spectroscopy

Y. Yonezawa, N. Inoue, Y. Takubo, Y. Goto, T. Sugiyama

Electrochemical Society
6 Conference Proceedings Nitrogen Concentration Measurement of CZ Silicon

Inoue, N., Fujiyama, N., Yagi, H.

Electrochemical Society
12 Conference Proceedings Microwave absorption in liquid crystals and carbon nanotubes

Dahiya, J.N., Athinarayanan, R., Roberts, J.A., Tour, J.M., Price, D.W., Jr.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12