Blank Cover Image

Parameters of Intrinsic Point Defects in Silicon Based on Crystal Growth, Wafer Processing, Self- and Metal-Dìffusion

Author(s):
Publication title:
Silicon materials science and technology X
Title of ser.:
ECS transactions
Ser. no.:
2(2)
Pub. Year:
2006
Page(from):
61
Page(to):
76
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
Language:
English
Call no.:
E23400/2-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Point defects in silicon crystal growth

Voronkov, V.V., Falster, R.

Electrochemical Society
7 Conference Proceedings Dynamics of Point Defects and Formation of Microdefects in Czochralski Crystal Growth: Modeling, Simulation and Experiments

Kulkami, M.S., Voronkov, V.V., Falster, R.

Electrochemical Society
2 Conference Proceedings Behaviour and effects of intrinsic point defects in the growth of large silicon crystals

Voronkov, V.V., Falster, R., Holzer, J.C.

Electrochemical Society
8 Conference Proceedings Rapid Thermal Processing and the Control of Oxygen Precipitation Behaviour in Silicon Wafers

R.J. Falster, V.V. Voronkov

Trans Tech Publications
3 Conference Proceedings INVITED: INTRINSIC POINT DEFECTS AND REACTIONS IN THE GROWTH OF LARGE SILICON CRYSTALS

Falster, R., Voronkov, V.V., Holzer, J.C., Markgrafh, S., McQuaid, S.A., Mule'Stagno, L.

Electrochemical Society
9 Conference Proceedings Nitrogen in Silicon: Properties and Impact on Grown-in Microdefects（Invited Paper）

Voronkov, V.V., Falster, R.

Electrochemical Society
4 Conference Proceedings Uphill Drift of Vacancies and Self-Interstitials in Silicon Crystal Growth

V. Voronkov, R. Falster

Electrochemical Society
10 Conference Proceedings Thresholds for Effective Internal Gettering in Silicon Wafers

Falster, R., Voronkov, V.V., Resmik, V.Y., Milvidskii, M.G.

Electrochemical Society
5 Conference Proceedings Grown-in Microdefects in Silicon as a Guide to the Properties of Point Defects *

Voronkov, V.V., Falster, R.

Electrochemical Society
11 Conference Proceedings Intrinsic Point Defects and Diffusion Processes in Silicon

Tan, T. Y.

North-Holland
6 Conference Proceedings Rapid Thermal Processing and the Engineering of Intrinsic Point Defect Profiles and Silicon Materials Properties

Falster, R.

Electrochemical Society
12 Conference Proceedings Investigation of Diffusion Process Induced Defects in High Purity Silicon Crystals

Kozlov, V.A., Eremin, V.K., Shulpina, I.L., Voronkov, V.B., Ivanov, A.M., Elyseyev, V.V., Chibirkin, V.V.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12