Blank Cover Image

An Easy Method to Measure the Damaged Thickness of Low-k Film after Ash Process

Author(s):
C. Shim
H. Lim
S. Jung
I. Shin
K. Park
J. Whang
H. Lee
J. Kim
J. Han
K. Kim
5 more
Publication title:
Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing
Title of ser.:
ECS transactions
Ser. no.:
2(1)
Pub. date:
2006
Page(from):
243
Page(to):
254
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774383 [1566774381]
Language:
English
Call no.:
E23400/2-1
Type:
Conference Proceedings

Similar Items:

Jung, H. Y., Ha, T. J., Shin, J. C., Jeong, K. C., Kim, Y. K., Han, O.

SPIE - The International Society of Optical Engineering

Park, H. J., Kim, S. S., Lee, S., Choi, T. H., Lee, H. W., Lim, S. J., Kim, E. Z., Na, K. H., Han, C. S.

Trans Tech Publications

Lee, W. J., Lee, Y. S., Rha, S. K., Lim, K. Y., Lee, H. S., Whang, C. N.

Trans Tech Publications

Choi, S. C., Kim, K. H., Jung, H-J., Whang, C. N., Koh, S. K.

MRS - Materials Research Society

Ko, Y. K., Lee, S., Yang, H. J., Shim, C., Jung, D., Lee, J. G.

Materials Research Society

Shin,J.-C., Won,J.-I., Jung,H.-Y., Kim,M.-S., Choi,Y.-K., Han,O.

SPIE-The International Society for Optical Engineering

S. Kim, C. Shim, J. Hong, H. Lee, J. Han, K. Kim, Y. Kim

Electrochemical Society

Kim, K. W., Chae, K. H., Choi, S. C., Cho, S. J., Vahe, Y. W., Whang, C. N., Jung, H. J., Lee, D. H., Lee, J. K.

Materials Research Society

Cho, B.-H., Yim, D., Park, C.-H., Lee, S.-H., Yang, H.-J., Choi, J.-H., Shin, Y.-C., Kim, C.-D., Choi, J.-S., Kang, …

SPIE-The International Society for Optical Engineering

Kim,K.H., Shim,J.S., Park,H.S., Jung,K.H., Shin,D.-H.

SPIE-The International Society for Optical Engineering

Kim J. D, Shim J. H, Han D. C, Park C. J, Park D. C, Lee S. G

SPIE - The International Society of Optical Engineering

Jung, J.-C., Kong, K.-K., Hwang, Y.-S., Park, K.-D., Lee, S.-K., Lee, G.S., Kim, J.S., Shin, K.-S.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12