Blank Cover Image

Electrical Characterization of Platinum Thin Films Deposited by Focused Ion Beam

Author(s):
Publication title:
Microelectronics Technology and Devices : SBMICRO 2007
Title of ser.:
ECS transactions
Ser. no.:
9(1)
Pub. Year:
2007
Page(from):
235
Page(to):
242
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775656 [1566775655]
Language:
English
Call no.:
E23400/9-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Fabrication of Multi-point Test Structures Using Focused Ion Beam and Selective Carbon Nanotubes Deposition by Dielectrophoresis

M.M. Silva, A. Vaz, C. Veríssimo, S.A. Moshkalev, J.W. Swart

Electrochemical Society
7 Conference Proceedings THIN FILM INHOMOGENEITY CHARACTERIZATION BY ION BEAM TECHNIQUE

Capuj E. N., Arista R. N., Lantchsner H. G., Eckardt C. J., Jakes M. M.

Kluwer Academic Publishers
2 Conference Proceedings Contact Improvement for Carbon Nanotubes Deposited by Dielectrophoresis

J. Leon, A. R. Vaz, A. Flacker, S. A. Moshkalev, M. B. de Moraes, J. W. Swart

Electrochemical Society
8 Conference Proceedings 51 Structural and Electrical Characterization of Zirconium Oxide Thin Films Deposited by MOCVD

Lisker, M., Silinskas, M., Matichyn, S., Dargis, R., Kalkofen, B., Burte, E.P.

Electrochemical Society
3 Conference Proceedings The Influence of Substrates on the Carbon Nanotube Growth Process

M. R. de Aguiar, C. Verissimo, S. A. Moshkalev, J. W. Swart

Electrochemical Society
9 Conference Proceedings Preparation and Characterization of Silicon Nanostructures Obtained by Ion Implantation

Mestanza, S. N. M., Dias, G. O., Queiroz, J. E. C., Doi, I., Swart, J. W., Rodriguez, E., Neves, A. A. R., Martinho, H.

Electrochemical Society
4 Conference Proceedings Electrical Characterization of Multi-Walled Carbon Nanotubes in 2 and 4 Terminals Configurations

J. Leon, S.A. Moshkalev, A. Flacker, A. Vaz, C. Veríssimo

Electrochemical Society
10 Conference Proceedings Formation of Nickel Silicides onto (100) Silicon Wafcr Surfaces Using a Thin Platinum Interlayer

Reis, R.W., dos Santos Filho, S.G., Doi, I., Swart, J.W.

Electrochemical Society
5 Conference Proceedings *PROCESSING AND STRUCTURAL CHARACTERIZATION OF FERROELECTRIC THIN FILMS DEPOSITED BY ION BEAM SPUTTERING

Ameen, M.S., Graettinger, T.M., Rou, S.H., Al-Shareef, H.N., Gifford, K.D., Auciello, O., Kingon, A.I.

Materials Research Society
11 Conference Proceedings Thermal Stability and Analysis of Laser Deposited Platinum Films

Berry, G.J., Gairns, J.A., Davidson, M.R., Fan, Y.C., Fitzgerald, A.G., Fzea, A.H., Lobban, J., McGivern, P., Thomson, …

Materials Research Society
6 Conference Proceedings CHARACTERIZATION OF KNbO3 THIN FILMS DEPOSITED BY ION BEAM SPUTTERING USING A COMPUTER-CONTROLLED ROTATING TARGET HOLDER

Ameen, M. S., Graettinger, T. M., Auciello, O., Rou, S. H., Kingon, A. I., Krauss, A. R.

Materials Research Society
12 Conference Proceedings Near-UV to IR optical characterization of YF3 thin films deposited by evaporation and ion beam processes

Quesnel,E., Berger,M., Cigna,J., Duca,D., Pelle,C., Pierre,F.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12