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Characteristics of ZoO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition

Author(s):
Publication title:
Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA
Title of ser.:
ECS transactions
Ser. no.:
1(10)
Pub. Year:
2006
Page(from):
125
Page(to):
130
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774437 [1566774438]
Language:
English
Call no.:
E23400/1-10
Type:
Conference Proceedings

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