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Low-k SiBN (Silicon Boron Nitride) Film Synthesized by a Plasma-Assisted Atomic Layer Deposition

Author(s):
S. Yang
J. Kim
J. Noh
H. Kim
S. Lee
J. Ahn
K. Hwang
Y. Shin
U. Chung
J. Moon
D. Lee
I. Yi
R. Jung
S. Kang
9 more
Publication title:
Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA
Title of ser.:
ECS transactions
Ser. no.:
1(10)
Pub. date:
2006
Page(from):
79
Page(to):
94
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774437 [1566774438]
Language:
English
Call no.:
E23400/1-10
Type:
Conference Proceedings

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