High Performance Metal Gate CMOSFETs with Aggressively Scaled Hf-Based High-k
- Author(s):
S. Song G. L. Zhang S. Bae P. Kirsch P. Majhi R. Choi B. Lee - Publication title:
- Physics and technology of high-k gate dielectrics III
- Title of ser.:
- ECS transactions
- Ser. no.:
- 1(5)
- Pub. Year:
- 2006
- Page(from):
- 609
- Page(to):
- 624
- Pages:
- 16
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774444 [1566774446]
- Language:
- English
- Call no.:
- E23400/1-5
- Type:
- Conference Proceedings
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