Blank Cover Image

Evaluation of Nb(Si)N as Metal Gate Material

Author(s):
N. Van Hoornick
H. De Witte
T. Hitters
C. Zhao
T. Canard
H. Huatori
J. Swerts
T. Schram
J. Maes
S. De Gendt
M. Heyns
6 more
Publication title:
Physics and technology of high-k gate dielectrics III
Title of ser.:
ECS transactions
Ser. no.:
1(5)
Pub. date:
2006
Page(from):
495
Page(to):
506
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774444 [1566774446]
Language:
English
Call no.:
E23400/1-5
Type:
Conference Proceedings

Similar Items:

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society

J. Swerts, Y. Fedorenko, J. Maes, E. Tois, A. Delabie

Electrochemical Society

KiTTL, J. A. 1, PAWLAK, M. A., LAUWERS, A., SCHRAM, T., POURTOIS, G., VELOSO, A., Yu, H., HOFFMANN, T., DEMEURISSE, C., …

Electrochemical Society

Carter, R.J., Tsai, W., Young, E., Caymax, M., Maes, J.W., Chen, P.J., Delabie, A., Zhao, C., Gendt, S.De, Heyns, M.

Materials Research Society

De Gendt, S., Brunco, D., Caymax, M., Canard, T., Date, L., Delabie, A., Deweerd, W., Groeseneken, G., Houssa, M., Hyun, …

Electrochemical Society

Kubicek, S., Van Elshocht, S., Delabie, A., Yamamoto, K., Beckx, S., Claes, M., Van Hoornick, N., Kwak, D.-H., Hyun, S., …

Electrochemical Society

De Witte, H., Passefort, S., Besling, W., Maes, J.W.H., Eason, K., Youngand, E., Heyns, M.

Electrochemical Society

Zhao, C., Rittersma, Z. M., Van Berkum, J. G. M., Snijders, J. H. M., Hendriks, A., Breimer, P., Groat, P., Maes, J. W., …

Electrochemical Society

Lander, R., Schram, T., Lulan, G.S., hooker, J., Vertommen, J., Lee, S., de Weerd, W., Boullart, W., van Elshocht, S, …

Electrochemical Society

11 Conference Proceedings Thermal Stability of High-k Layers

Zhao, C., Cosnier, V., Chen, P.J., Richard, O., Roebben, G., Maes, J., Elshocht, S.Van, Bender, H., Young, E., Biest, …

Materials Research Society

Tsai, W., Ragnarrson, L.-A., Schram, T., DeGendt, S., Heyns, M.

Electrochemical Society

12 Conference Proceedings ALD HfO2 Surface Preparation Study

Delabie, Annelies, Caymax, M., Maes, J.W., Bajolet, P., Brijs, B., Cartier, E., Conard, T., Gendt, S.De, Richard, O., …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12