Y-Doped HfO₂ Thin Films Grown by Injection MOCVD

Y-Doped HfO₂ Thin Films Grown by Injection MOCVD

Author(s):

K. Rasewel Buzin

Publication title:

Physics and technology of high-k gate dielectrics III

Title of ser.:

ECS transactions

Ser. no.:

1(5)

Pub. Year:

2006

Page(from):

249

Page(to):

256

Pages:

8

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774444 [1566774446]

Language:

English

Call no.:

E23400/1-5

Type:

Conference Proceedings

Details

TDL ID:	ZA00047099
Series ID:	PA00000034
Conf. info. (Name):	International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues
Conf. info. (Number):	3rd
Conf. info. (Venue):	Los Angeles, California, USA
Conf. info. (Date):	2005.10.16-2005.10.21

Similar Items:

1 Conference Proceedings Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD Modreanu, M., Hurley, P.K., O'Sullivan, B.J., O'Looney, B., Senateur, J.-P., Rousell, H., Rousell, F., Audier, M., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings V2O5 and β-CuxV2O5 Thin Films Grown by MOCVD Gleizes, A., Bufforn, J-M., Salzman, C., Virette, E., Senocq, F. MRS - Materials Research Society
2 Conference Proceedings HfO2 Films Obtained By Injection MOCVD Leedham, T.J., Davies, H.O., Jones, A.C., O'Sullivan, B.J., Mondreau, M., Hurley, P.K., Fang, Q., Boyd, I.W. Electrochemical Society	8 Conference Proceedings Aluminum Doping of 4H-SiC Grown with HexaMethylDiSilane Sartel, C., Souliere, V., Zielinski, M., Monteil, Y., Camassel, J., Rushworth, S. Trans Tech Publications
3 Conference Proceedings Textured SrTiO3 Thin Films on SiO2/Si by Liquid Injection MOCVD Using a New Bimetallic Precursor Lhostis, S., Audier, M., Senateur, J-P., Dubourdieu, C., Auvray, L. Electrochemical Society	9 Conference Proceedings Incidence of Deposition Parameters on the Structural Properties of Y2O3 Grown by Pulsed Injection PE-MOCVD Durand, C., Vallee, C., Salicia, O., Loup, V., Bonavalot, M, Joubert, O., Dubourdieu, C. Electrochemical Society
4 Conference Proceedings Structural characterization using synchrotron radiation of oxide films and multilayers grown by MOCVD Dubourdieu, C., Lindner, J., Audier, M., Rosina, M., Weiss, F., Senateur, J. P., Hodeau, J. L., Dooryhee, E., Berar, J. … MRS-Materials Research Society	10 Conference Proceedings Search for magnetism in Co and Fe doped HfO2 thin films for spintronic applications Rao, M. S. R., Kundaliya, Darshan C., Dhar, S., Cardoso, C. A., Curtin, A., Welz, S. J., Erni, R., Browning, N. D., … Materials Research Society
5 Conference Proceedings SrZrOa thin films grown by direct liquid injection MOCVD Gasqueres, C., Gallet, I., Herbst-Ghysel, M., Andrieux, M., Condat, M., Kessler, V. G., Seisenbaeva, G. A., Poissonnet, … Electrochemical Society	11 Conference Proceedings Lead Containing Perovskite Films and Superlattices Grown by MOCVD in Self- Tuning Mode Bosak, A., Gorbenko, O., Kaul, A., Graboy, I., Mirin, N., Gudenko, S., Dubourdieu, C., Senateur, J.-P. Electrochemical Society
6 Conference Proceedings Growth of Al2O3 Films by Pulsed Injection MOCVD: Comparative Study of Precursor Materials Abrutis, A., Bartasyte, A., Kubilius, V., Teiserskis, A., Baumann, P., Lindner, J., Schumacher, M., Dubourdieu, C. Electrochemical Society	12 Conference Proceedings Sc Addition In HfO₂ Thin Films Prepared By Liquid-injection MOCVD V. Brize, F. Terrenoir, I. Matko, N. Rochat, B. Holländer Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12