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Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

Author(s):
Publication title:
Corrosion and electrochemistry of advanced materials, in Honor of Koji Hashimoto
Title of ser.:
ECS transactions
Ser. no.:
1(4)
Pub. Year:
2006
Page(from):
465
Page(to):
478
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774970 [1566774977]
Language:
English
Call no.:
E23400/1-4
Type:
Conference Proceedings

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