Blank Cover Image

EFFECT OF CORROSION INHIBITOR, lH-BENZOTRJAZOLE (BTAH) ON PARTICLE ADHESION IN Cu CMP

Author(s):
J.-H. Song
Y.-K. Hong
T.-G. Kim
Y.-J. Kang
I.-K. Kim
J.-H. Han
J.-G. Park
A. A. Busnaina
3 more
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. date:
2006
Page(from):
341
Page(to):
348
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

Similar Items:

Hong, Y.K., Eom, D.H., Lee, S.H., Park, J.G., Busnaina, A.A.

Electrochemical Society

Lee, S.-Y., Lee, S.-H., Eom, D.-H., Kim, K.-S., Song, H.-S., Park, J.-G.

Electrochemical Society

Y.-K. Hong, J.-H. Song, Y.-J. Kang, I.-K. Kim, J.-G. Park, H.-S. Song, K.-S. Kim, J.-J. Myung, H.-J. Lee, S.-Y. Song

Electrochemical Society

Hong, Y.-K., Eom, D.-H., Park, J.-G.

Electrochemical Society

Park, J., Busnaina, A.A.

Electrochemical Society

Kang, Young-Jae, Hong, Yi-Koan, Song, Jae-Hoon, Kim, In-Kwon, Park, Jin-Goo

Materials Research Society

Kim, In-Kwon, Kang, Young-Jae, Hong, Yi-Koan, Park, Jin-Goo

Materials Research Society

Chung, U. I., Hah, S. R., Han, J. H., Hong, C. K., Kang, G. W., Kim, K. H.

Materials Research Society

Song, Jae-Hoon, Han, Ja-Hyung, Hong, Yi-Koan, Kang, Young-Jae, Park, Jin-Goo, Maeng, Ju-Ho, Won, Young-Man

Materials Research Society

T. Kim, S. Hu, A.A. Busnaina, J. Park

Electrochemical Society

Hong, Yi-Koan, Han, Ja-Hyung, Song, Jae-Hoon, Park, Jin-Goo

Materials Research Society

Eom, D.-H., Hong, Y.-K., Lee, S.-H., Park, J.-Y., Myung, J.-J., Park, J.-G., Kim, K.-S., Song, H.-S., Park, H.-S., Choi, …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12