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WAFER SURFACE CONTAMINATION REDUCTION FROM SILICON CARBIDE COMPONENTS AT ELEVATED TEMPERATURES

Author(s):
I. Rapoport
P. Taylor
S.-B. Kim
B. Orschel
J. Kearns
Y. Narendar
1 more
Publication title:
Cleaning Technology in Semiconductor Device Manufacturing IX
Title of ser.:
ECS transactions
Ser. no.:
1(3)
Pub. Year:
2006
Page(from):
234
Page(to):
242
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774291 [1566774292]
Language:
English
Call no.:
E23400/1-3
Type:
Conference Proceedings

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